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Last update 20 Feb 2024

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Notes

  1. Class number (2*) for Emulsion-on-glass photomasks differs from usual Chrome-on-glass. Specifications are in the tech info section.
  2. Download CoC Format Pattern facsimile
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Technical documents

Product user guide
CoC Format

It’s possible to calculate dimensional tolerance of pattern’s features is calculated as follows:

`Maßtoleranz = ± (A + B * C)`

Example of dimensional tolerance for grade 2 pattern over 10mm length:

Dimensional Tolerance = ± 0.0016mm + (±0.000008mm x 10 mm) = ± 0.00168 mm

For Chrome-on-glass Photomask
ClassMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
11.46.40.016
20.81.60.008
30.40.60.004
40.20.20.001
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For Film-on-glass Photomask
GradeMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
19.69.60.015
24.89.60.015
32.49.60.015
41.29.60.015
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